Domestically Produced Diffusion Pump Oil has Reached the Same Level as CVC-4.
Jan 27, 2026
Product Name: Diffusion Pump Fluid
Item NO.: SilibaseDPF-B704
Advantages:
SILIBASE SILICONE diffusion pump oil achieves high vacuum performance comparable to CVC-4 thanks to its excellent thermal stability and oxidation resistance.
thermal stability, oxidation resistance, radiation resistance. Composition: single component benzyl silicone oil.
Application:
Generate uncaptured vacuum of 10-5to 10-8 Torr and captured vacuum of 10-10to 10-11 Torr (SilibaseDPF-B704 diffusion pump oil);℃
The single-component phenyl silicone oil diffusion pump fluid produced in Chinese factories has reached the level of CVC 4 grade silicone oil diffusion pump fluid in key indicators such as ultimate vacuum, pumping rate and resistance to high-temperature decomposition. For particularly tough rugged applications requiring rapid pump down :
Vapour deposition of thin films by sputtering or evaporation, electron beam operations and high vacuum furnaces, melting, degassing and sintering, refractory metals and thick film deposition.
Also suitable for all aspects of vacuum coating such as optics and automotive components.
UHV characteristics particularly useful for thin film, surface technology,thermonuclear and plasma physics applications.
Features:
Good resistance to high temperature breakdown
Ultra high vacuum performance
Extremely low back streaming properties
Rapid pump down
Safer to use than hydrocarbon diffusion pump fluids
Index
Appearance : Colorless transparent liquid
Relativedensity (25℃) : 1.06-1.07℃
Viscosity(25℃): 35-41mm²/s
Flash point(open): 230℃
Freezing point: -35℃
Ultimate vacuum torr: 10-7_10-8
Saturation vapour pressure: 6.65×10-6Pa
Molecular description / Tetramethyltetraphenyl -silsesquioxane
Qualification:
Application Description:
Domestically produced diffusion pump oil has reached the international advanced level in terms of anti-backflow characteristics and rapid vacuuming capability, and is especially suitable for harsh industrial application scenarios.
SilibaseDPF-B704 is commonly used in high-vacuum diffusion pumps. SilibaseDPF-B704 remains the market's most widely adopted diffusion pump oil, designed for heavy-duty operations and rapid vacuum generation. This single-component oil contains purified tetramethyltetraphenylsiloxane, delivering a critical vacuum range of 10E-7to 10E-8 Torr under non-capturing conditions and 10E-10to 10E-11 Torr under capturing conditions. Manufacturers prioritize SilibaseDPF-B704's ability to withstand harsh operating environments while maintaining exceptional vacuum performance. Unlike most diffusion pumps that require airtight sealing, SilibaseDPF-B704 remains air-tolerant even at elevated temperatures.
Advantages of SILIBASE SILICONE Diffusion Pump Oil:
1.Reduced adjustment time: Single-component silicone oil achieves maximum performance
in significantly less time than multi-component organic oils;
2. Silicone oil diffusers can achieve 20-300% higher initial pressure than organic oil pumps. To enhance gas flow at the high-pressure end of the pump's working range, heater input can be increased by 20-30%;
3. Silicone oil's thermal and chemical stability ensure long-term operation without degradation or contamination;
4. At damper temperature, silicone oil's low vapor pressure minimizes migration. Nozzles and
boiler surfaces remain clean; under operating conditions, silicone oil shows minimal decomposition or breakdown.
Application:
SILIBASE SILICONE diffusion pump oil can be used for a variety of purposes, including: high vacuum smelting industry, electron tube industry, bulbs, high vacuum coating (film), atomic energy accelerator and electron microscope, display, etc.
Storage Conditions and Expiry Date:
When stored in an original unopened container at or below 25℃ (77 F°), the shelf life of these products is 48 months from the date of production.
Note: This product has not been tested and is not suitable for medical or pharmaceutical use.
High-performance domestically produced alternatives, such as the SilBaseDPF-B704, have successfully entered the high-vacuum field. This product combines radiation resistance, low vapor pressure, and excellent long-term stability, providing the industry with a reliable and competitive new option. This progress has not only promoted the self-sufficiency of the related industry supply chain but also accelerated the pace of technological upgrading across the entire industry.